发明授权
US07241641B2 Attachment of integrated circuit structures and other substrates to substrates with vias
有权
将集成电路结构和其他基板连接到具有通孔的基板上
- 专利标题: Attachment of integrated circuit structures and other substrates to substrates with vias
- 专利标题(中): 将集成电路结构和其他基板连接到具有通孔的基板上
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申请号: US11253492申请日: 2005-10-19
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公开(公告)号: US07241641B2公开(公告)日: 2007-07-10
- 发明人: Sergey Savastiouk , Sam Kao
- 申请人: Sergey Savastiouk , Sam Kao
- 申请人地址: US CA Sunnyvale
- 专利权人: Tru-Si Technologies, Inc.
- 当前专利权人: Tru-Si Technologies, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: MacPherson Kwok Chen & Heid LLP
- 代理商 Michael Shenker
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
Vias (210, 210B) are formed in a surface of a substrate. At least portions of contact pads (139, 350) are located in the vias. Contact pads (150, 340) of an integrated circuit structure are inserted into the vias and attached to the contact pads (139, 350) of the substrate. The vias provide a strong, reliable mechanical and electrical connection. A via may expose not only a contact pad (350) in the substrate but also a surrounding region. Solder (930) wets the contact pad better than the surrounding region, resulting in a stronger solder joint and better electrical conductivity. Alternatively, the contact may include multiple conductive layers (910.1, 910.2), with the top layer (910.2) being more solder wettable than the bottom layer (910.1) and the top layer covering only a portion of the bottom layer.
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