ELECTROPLATING AND ELECTROLESS PLATING OF CONDUCTIVE MATERIALS INTO OPENINGS, AND STRUCTURES OBTAINED THEREBY
    7.
    发明申请
    ELECTROPLATING AND ELECTROLESS PLATING OF CONDUCTIVE MATERIALS INTO OPENINGS, AND STRUCTURES OBTAINED THEREBY 有权
    导电材料的电镀和电镀镀层开放,并获得结构

    公开(公告)号:US20070128868A1

    公开(公告)日:2007-06-07

    申请号:US11548053

    申请日:2006-10-10

    IPC分类号: H01L21/44

    摘要: A through hole (114) is formed in a wafer (104) comprising a semiconductor substrate (110). A seed layer (610) is sputtered on the bottom surface of the wafer. The seed is not deposited over the through hole's sidewalls adjacent the top surface of the wafer. A conductor (810) is electroplated into the through hole. In another embodiment, a seed is deposited into an opening in a wafer through a dry film resist mask (1110). The dry film resist overhangs the edges of the opening, so the seed is not deposited over the opening's sidewalls adjacent the top surface of the wafer. In another embodiment, a dielectric (120) is formed in an opening in a semiconductor substrate (110) by a non-conformal physical vapor deposition (PVD) process that deposits the dielectric on the sidewalls but not the bottom of the opening. A seed (610) is formed on the bottom by electroless plating. A conductor (810) is electroplated on the seed. In another embodiment, a dielectric (2910) is formed in the opening to cover the entire surface of the opening. A non-conformal layer (120) is deposited by PVD over the sidewalls but not the bottom of the opening. The dielectric (2910) is etched off the bottom with the non-conformal layer (120) as a mask. A seed (610) is formed on the bottom by electroless plating. The non-conformal layer can be formed by electroplating. It can be tantalum deposited by electroplating, then anodized. Other embodiments are also provided.

    摘要翻译: 在包括半导体衬底(110)的晶片(104)中形成通孔(114)。 种子层(610)溅射在晶片的底表面上。 种子不会沉积在邻近晶片顶表面的通孔的侧壁上。 导体(810)电镀到通孔中。 在另一个实施例中,通过干膜抗蚀剂掩模(1110)将种子沉积在晶片的开口中。 干膜抗蚀剂突出于开口的边缘,因此种子不会沉积在邻近晶片顶表面的开口的侧壁上。 在另一个实施例中,电介质(120)通过非接触式物理气相沉积(PVD)工艺在半导体衬底(110)的开口中形成,该方法将电介质沉积在侧壁上而不是开口的底部。 通过化学镀在底部形成种子(610)。 导体(810)电镀在种子上。 在另一个实施例中,电介质(2910)形成在开口中以覆盖开口的整个表面。 非共形层(120)通过PVD沉积在侧壁上而不是开口的底部。 用非保形层(120)作为掩模将电介质(2910)从底部蚀刻掉。 通过化学镀在底部形成种子(610)。 非保形层可以通过电镀形成。 可以通过电镀沉积钽,然后阳极氧化。 还提供了其他实施例。