Invention Grant
US07243003B2 Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
有权
基板载体处理器，可直接从移动的输送机卸载基板托架
- Patent Title: Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
- Patent Title (中): 基板载体处理器，可直接从移动的输送机卸载基板托架
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Application No.: US10650480Application Date: 2003-08-28
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Publication No.: US07243003B2Publication Date: 2007-07-10
- Inventor: Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
- Applicant: Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
Public/Granted literature
- US20040081538A1 Substrate carrier handler that unloads substrate carriers directly from a moving conveyor Public/Granted day:2004-04-29
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