发明授权
US07244936B2 Chemical species detection including a multisection laser for improved process monitoring 有权
化学物种检测包括用于改进过程监测的多段激光

  • 专利标题: Chemical species detection including a multisection laser for improved process monitoring
  • 专利标题(中): 化学物种检测包括用于改进过程监测的多段激光
  • 申请号: US11211073
    申请日: 2005-08-25
  • 公开(公告)号: US07244936B2
    公开(公告)日: 2007-07-17
  • 发明人: William A. Von Drasek
  • 申请人: William A. Von Drasek
  • 申请人地址: US TX Houston
  • 专利权人: American Air Liquide, Inc.
  • 当前专利权人: American Air Liquide, Inc.
  • 当前专利权人地址: US TX Houston
  • 代理商 Elwood L. Haynes; Christopher J. Cronin
  • 主分类号: G01J5/02
  • IPC分类号: G01J5/02
Chemical species detection including a multisection laser for improved process monitoring
摘要:
A gas species monitoring system includes a laser system, where the laser system includes a multisection DBR laser, and a plurality of measurement points disposed at different locations within the system. The laser system is configured to selectively deliver a laser beam from the multisection DBR laser to each measurement point within the system to determine a concentration of at least one gas species at each measurement point. A chemical detection grid is aligned with the ITU-GRID to facilitate use of a multisection DRB laser that operates within one or more of the defined bands of the ITU-GRID.
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