发明授权
- 专利标题: Chemical species detection including a multisection laser for improved process monitoring
- 专利标题(中): 化学物种检测包括用于改进过程监测的多段激光
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申请号: US11211073申请日: 2005-08-25
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公开(公告)号: US07244936B2公开(公告)日: 2007-07-17
- 发明人: William A. Von Drasek
- 申请人: William A. Von Drasek
- 申请人地址: US TX Houston
- 专利权人: American Air Liquide, Inc.
- 当前专利权人: American Air Liquide, Inc.
- 当前专利权人地址: US TX Houston
- 代理商 Elwood L. Haynes; Christopher J. Cronin
- 主分类号: G01J5/02
- IPC分类号: G01J5/02
摘要:
A gas species monitoring system includes a laser system, where the laser system includes a multisection DBR laser, and a plurality of measurement points disposed at different locations within the system. The laser system is configured to selectively deliver a laser beam from the multisection DBR laser to each measurement point within the system to determine a concentration of at least one gas species at each measurement point. A chemical detection grid is aligned with the ITU-GRID to facilitate use of a multisection DRB laser that operates within one or more of the defined bands of the ITU-GRID.
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