发明授权
- 专利标题： Contamination barrier with expandable lamellas
- 专利标题（中）： 可扩展薄片的污染屏障
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申请号： US10743265申请日： 2003-12-23
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公开(公告)号： US07247866B2公开(公告)日： 2007-07-24
- 发明人: Levinus Pieter Bakker , Marcel Mathijs Theodore Marie Dierichs , Johannes Maria Freriks , Frank Jeroen Pieter Schuurmans , Jakob Vijfvinkel , Wilhelmus Josephus Box
- 申请人： Levinus Pieter Bakker , Marcel Mathijs Theodore Marie Dierichs , Johannes Maria Freriks , Frank Jeroen Pieter Schuurmans , Jakob Vijfvinkel , Wilhelmus Josephus Box
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 优先权： EP02080454 20021223; EP03075086 20030113
- 主分类号： G21G5/00
- IPC分类号： G21G5/00
摘要：
A contamination barrier that passes through radiation from a radiation source and captures debris coming from the radiation source is disclosed. The contamination barrier includes an inner ring, an outer ring, and a plurality of lamellas. The lamellas extend in a radial direction from a main axis, and each of the lamellas is positioned in a respective plane that include the main axis. At least one outer end of each of the lamellas is slidably connected to at least one of the inner and outer ring.
公开/授权文献
- US20040184014A1 Contamination barrier with expandable lamellas 公开/授权日：2004-09-23
信息查询
IPC分类:
| G | 物理 |
| G21 | 核物理；核工程 |
| G21G | 化学元素的转变；放射源 |
| G21G5/00 | 通过化学反应进行化学元素的推断转变 |