摘要:
A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.
摘要:
A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source. The contamination barrier includes a support structure, a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure, and a shield configured to block at least part of the support structure from being hit by radiation or debris from the radiation source.
摘要:
A reference frame provided in a vacuum chamber is supported by support pillars extending through and isolated from the vacuum chamber walls to isolate the reference frame from vibrations in the vacuum chamber. The gap between the support pillar and the vacuum chamber wall may be sealed by a low-stiffness seal. The low stiffness seal may be a three part seal allowing relative motion in six-degrees of freedom.
摘要:
An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.
摘要:
The invention relates to a magnetic clamping device with a clamping body (1) comprising a cylinder plate (2) of non-magnetizable material provided with cylinders (5), a clamping plate (3) of non-magnetizable material situated at one side of the cylinder plate, a closing plate (4) situated at the other side of the cylinder plate, and pistons (9) made at least partly from magnetic material which are movable in the respective cylinders, which clamping body is further provided with channels (13, 14) to which a fluidic pressure source can be connected for the simultaneous movement of the pistons in the cylinders towards and away from the clamping plate. To improve the magnetic clamping action, all magnetic pistons (9) are fastened to a common piston plate (8). This ensures that all magnetic pistons, when energized, will exert their magnetic influence on the object to be clamped.
摘要:
A device (1) for supporting a rotatable body (3) in a direction parallel to an axis of rotation (5) of the body (3). The device (1) comprises a support member (17) with a fluid bearing (21) which maintains a beating gap (23) between a bearing surface (15) of the body (3) extending perpendicular to the axis of rotation (5) and a bearing surface (19) of the support member (17) extending perpendicular to the axis of rotation (5) during operation. Manufacturing tolerances may lead to deviations from perpendicularity of the beating surfaces (15, 19) relative to the axis of rotation (5), which deviations cause an undesirable vibration of the body (3) parallel to the axis of rotation (5) during rotation of the body (3). This vibration is prevented in that the support member (17) is coupled to a frame (11) of the device (1) by means of an elastically deformable coupling member (25), whereby the bearing surface (19) is pivotable about two mutually perpendicular pivot axes (27, 29) which intersect in a point of intersection (31) of the axis of rotation (5) and the bearing surface (19). The point of intersection (31) of the axis of rotation (5), the pivot axes (27, 29) and the bearing surface (19) is defined in relation to the axis of rotation by means of the coupling member (25). The device (1) is used in a positioning device (127) for machining a rotatable workpiece (171) by means of a tool (149), during which the workpiece (171) is supported parallel to the axis of rotation (5) by the device (1).
摘要:
A radiation system includes a contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris coming from the radiation source. The contamination barrier includes a plurality of lamellas. The surface of the lamellas includes a material. The radiation system also includes a collector configured to collect radiation from the contamination barrier. An optical surface of the collector includes a material that is the same as the material of the surface of the lamellas.
摘要:
A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source. The contamination barrier includes a support structure, a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure, and a shield configured to block at least part of the support structure from being hit by radiation or debris from the radiation source.
摘要:
A grinding machine (1) for grinding a workpiece (40) comprises the following components: a cup wheel (10) having an annular grinding surface (11); a disc-shaped electrode (60), which is positioned in the vicinity of at least a portion of the grinding surface (11) such that a dressing area (75) is obtained in which a relatively small gap is present between the electrode (60) and the grinding surface (11), feed means (70) for feeding electrolyte to the dressing area (75); and a generator (20) for generating an electric current between the grinding surface (11) and the electrode (60), via the electrolyte. The electrode (60) is movable with respect to the dressing area (75), so that contamination of the electrode (60), which normally occurs as a result of the dressing process, is continuously removed. Consequently, the quality of the dressing process is maintained at a high level.
摘要:
A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.