发明授权
- 专利标题： Optical targets
- 专利标题（中）： 光学目标
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申请号： US10697394申请日： 2003-10-30
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公开(公告)号： US07247952B2公开(公告)日： 2007-07-24
- 发明人: Simon Dodd , Michael D. Miller , Joseph M. Torgerson
- 申请人： Simon Dodd , Michael D. Miller , Joseph M. Torgerson
- 申请人地址： US TX Houston
- 专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人地址： US TX Houston
- 主分类号： H01L23/544
- IPC分类号： H01L23/544 ; H01L21/70 ; G01B11/14
摘要：
An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer.
公开/授权文献
- US20050095439A1 Optical targets 公开/授权日：2005-05-05