发明授权
- 专利标题: Optical unit and associated method
- 专利标题(中): 光学单元及相关方法
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申请号: US10506716申请日: 2003-06-19
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公开(公告)号: US07248670B2公开(公告)日: 2007-07-24
- 发明人: Peter Hoghoj , Aurélien Dariel , Sergio Rodrigues
- 申请人: Peter Hoghoj , Aurélien Dariel , Sergio Rodrigues
- 申请人地址: FR
- 专利权人: Xenocs
- 当前专利权人: Xenocs
- 当前专利权人地址: FR
- 代理机构: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- 优先权: FR0300623 20030121; FR0207546 20030619
- 国际申请: PCT/FR03/01896 WO 20030619
- 国际公布: WO04/001770 WO 20031231
- 主分类号: G21K1/06
- IPC分类号: G21K1/06
摘要:
The invention relates to an optical assembly with a laterally graded reflective multilayer whose reflecting surface reflects incident X-rays under low incidence angles to produce a two-dimensional optical effect. The reflecting surface comprises a single surface conformed along two curvatures corresponding to two different directions. The invention also relates to a manufacturing method of such an optical assembly. The method includes coating a substrate already having a curvature. The invention also relates to a device for generating and conditioning X-rays for applications for angle-dispersive X-ray reflectometry. The device includes the optical assembly connected to an X-ray source so that X-rays emitted by the source are conditioned along two dimensions so as to adapt the beam emitted by the source to the sample, with the X-rays having different angles of incidence on the sample under consideration.
公开/授权文献
- US20050117239A1 Optical unit and associated method 公开/授权日:2005-06-02
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