Invention Grant
- Patent Title: Method of operating a resistive heat-loss pressure sensor
- Patent Title (中): 操作电阻式热损失压力传感器的方法
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Application No.: US11146721Application Date: 2005-06-07
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Publication No.: US07249516B2Publication Date: 2007-07-31
- Inventor: Michael D. Borenstein , Paul C. Arnold
- Applicant: Michael D. Borenstein , Paul C. Arnold
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L9/02
- IPC: G01L9/02

Abstract:
In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.
Public/Granted literature
- US20060021442A1 Method of operating a resistive heat-loss pressure sensor Public/Granted day:2006-02-02
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