发明授权
- 专利标题： Method of operating a resistive heat-loss pressure sensor
- 专利标题（中）： 操作电阻式热损失压力传感器的方法
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申请号： US11146721申请日： 2005-06-07
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公开(公告)号： US07249516B2公开(公告)日： 2007-07-31
- 发明人: Michael D. Borenstein , Paul C. Arnold
- 申请人： Michael D. Borenstein , Paul C. Arnold
- 申请人地址： US MA Chelmsford
- 专利权人： Brooks Automation, Inc.
- 当前专利权人： Brooks Automation, Inc.
- 当前专利权人地址： US MA Chelmsford
- 代理机构： Hamilton, Brook, Smith & Reynolds, P.C.
- 主分类号： G01L9/02
- IPC分类号： G01L9/02
摘要：
In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.
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