发明授权
US07250351B2 Enhanced silicon-on-insulator (SOI) transistors and methods of making enhanced SOI transistors 失效
增强的绝缘体上硅(SOI)晶体管和制造增强型SOI晶体管的方法

Enhanced silicon-on-insulator (SOI) transistors and methods of making enhanced SOI transistors
摘要:
Enhanced silicon-on-insulator transistors and methods are provided for implementing enhanced silicon-on-insulator transistors. The enhanced silicon-on-insulator (SOI) transistors include a thin buried oxide (BOX) layer under a device channel and a thick self-aligned buried oxide (BOX) region under SOI source/drain diffusions. A selective epitaxial growth is utilized in the source/drain regions to implement appropriate strain to enhance both PFET and NFET devices simultaneously.
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