发明授权
US07251086B2 Apparatus for positioning an optical element in a structure 失效
用于将光学元件定位在结构中的装置

Apparatus for positioning an optical element in a structure
摘要:
In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
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