Invention Grant
US07253417B2 Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
有权
多轴复合透镜，使用复合透镜的光束系统，以及使用复合透镜的方法
- Patent Title: Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
- Patent Title (中): 多轴复合透镜，使用复合透镜的光束系统，以及使用复合透镜的方法
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Application No.: US10539179Application Date: 2003-12-12
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Publication No.: US07253417B2Publication Date: 2007-08-07
- Inventor: Jürgen Frosien , Pavel Adamec
- Applicant: Jürgen Frosien , Pavel Adamec
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP02028345 20021217
- International Application: PCT/EP03/14140 WO 20031212
- International Announcement: WO2004/055856 WO 20040701
- Main IPC: H01J3/07
- IPC: H01J3/07 ; H01J29/51
Abstract:
The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.
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