发明授权
- 专利标题: Controllable ovonic phase-change semiconductor memory device
- 专利标题(中): 可控超声相变半导体存储器件
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申请号: US10644685申请日: 2003-08-20
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公开(公告)号: US07253430B2公开(公告)日: 2007-08-07
- 发明人: Trung T. Doan , D. Mark Durcan , Brent D. Gilgen
- 申请人: Trung T. Doan , D. Mark Durcan , Brent D. Gilgen
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: TraskBritt
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L29/00
摘要:
An ovonic phase-change semiconductor memory device having a reduced area of contact between electrodes of chalcogenide memories, and methods of forming the same are disclosed. Such memory devices are formed by forming a tip protruding from a lower surface of a lower electrode element. An insulative material is applied over the lower electrode such that an upper surface of the tip is exposed. A chalcogenide material and an upper electrode are either formed atop the tip, or the tip is etched into the insulative material and the chalcogenide material and upper electrode are deposited within the recess. This allows the memory cells to be made smaller and allows the overall power requirements for the memory cell to be minimized.
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