发明授权
- 专利标题: Iridium oxide nanowires and method for forming same
- 专利标题(中): 氧化铱纳米线及其形成方法
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申请号: US10971330申请日: 2004-10-21
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公开(公告)号: US07255745B2公开(公告)日: 2007-08-14
- 发明人: Fengyan Zhang , Robert A. Barrowcliff , Sheng Teng Hsu
- 申请人: Fengyan Zhang , Robert A. Barrowcliff , Sheng Teng Hsu
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: C30B29/62
- IPC分类号: C30B29/62
摘要:
Iridium oxide (IrOx) nanowires and a method forming the nanowires are provided. The method comprises: providing a growth promotion film with non-continuous surfaces, having a thickness in the range of 0.5 to 5 nanometers (nm), and made from a material such as Ti, Co, Ni, Au, Ta, polycrystalline silicon (poly-Si), SiGe, Pt, Ir, TiN, or TaN; establishing a substrate temperature in the range of 200 to 600 degrees C.; introducing oxygen as a precursor reaction gas; introducing a (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium(I) precursor; using a metalorganic chemical vapor deposition (MOCVD) process, growing IrOx nanowires from the growth promotion film surfaces. The IrOx nanowires have a diameter in the range of 100 to 1000 Å, a length in the range of 1000 Å to 2 microns, an aspect ratio (length to width) of greater than 50:1. Further, the nanowires include single-crystal nanowire cores covered with an amorphous layer having a thickness of less than 10 Å.
公开/授权文献
- US20060086314A1 Iridium oxide nanowires and method for forming same 公开/授权日:2006-04-27
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