发明授权
- 专利标题: Diaphragm activated micro-electromechanical switch
- 专利标题(中): 隔膜激活微机电开关
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申请号: US10523310申请日: 2002-08-26
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公开(公告)号: US07256670B2公开(公告)日: 2007-08-14
- 发明人: Christopher V. Jahnes , Jennifer L. Lund , Katherine L. Saenger , Richard P. Volant
- 申请人: Christopher V. Jahnes , Jennifer L. Lund , Katherine L. Saenger , Richard P. Volant
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 H. Daniel Schnurmann
- 国际申请: PCT/US02/27115 WO 20020826
- 国际公布: WO2004/019362 WO 20040304
- 主分类号: H01H51/22
- IPC分类号: H01H51/22
摘要:
A micro-electromechanical (MEM) RF switch provided with a deflectable membrane (60) activates a switch contact or plunger (40). The membrane incorporates interdigitated metal electrodes (70) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane (60), and is used to mechanically displace the switch contact (30). An RF gap area (25) located within the cavity (250) is totally segregated from the gaps (71) between the interdigitated metal electrodes (70). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch. The micro-electromechanical switch includes: a cavity (250); at least one conductive path (20) integral to a first surface bordering the cavity; a flexible membrane (60) parallel to the first surface bordering the cavity (250), the flexible membrane (60) having a plurality of actuating electrodes (70); and a plunger (40) attached to the flexible membrane (60) in a direction away from the actuating electrodes (70), the plunger (40) having a conductive surface that makes electric contact with the conductive paths, opening and closing the switch.
公开/授权文献
- US20060017533A1 Diaphragm activated micro-electromechanical switch 公开/授权日:2006-01-26
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