Invention Grant
- Patent Title: Real-time management systems and methods for manufacturing management and yield rate analysis integration
- Patent Title (中): 实时管理系统和方法,用于制造管理和收益率分析整合
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Application No.: US11228361Application Date: 2005-09-19
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Publication No.: US07260444B2Publication Date: 2007-08-21
- Inventor: Chien-Chung Chen , Sheng-Jen Wang , Yu-Wen Ho
- Applicant: Chien-Chung Chen , Sheng-Jen Wang , Yu-Wen Ho
- Applicant Address: TW Hsin-Chu
- Assignee: Powerchip Semiconductor Corp.
- Current Assignee: Powerchip Semiconductor Corp.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW94113263A 20050426
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A real-time management method for manufacturing management and yield rate analysis integration. A plurality of yield rates relating to wafer products are summed and averaged for a historical yield rate. Multiple representational inline QC parameters are selected. A statistical process is implemented and, if no extreme value and collinear parameter exists and if analysis results satisfy normal distribution, multiple optimum inline QC parameters are selected from the representational inline QC parameters. Weights of each optimum inline QC parameter are calculated. A predicted yield rate is calculated according to the historical yield rate, weights, and a plurality of measurement and target values relating to the wafer products.
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