发明授权
- 专利标题: Near-field photomask and near-field exposure apparatus including the photomask
- 专利标题(中): 包括光掩模的近场光掩模和近场曝光装置
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申请号: US10648317申请日: 2003-08-27
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公开(公告)号: US07262828B2公开(公告)日: 2007-08-28
- 发明人: Ryo Kuroda , Natsuhiko Mizutani
- 申请人: Ryo Kuroda , Natsuhiko Mizutani
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2002-261502 20020906
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/64 ; G03B27/16 ; G03F1/08 ; G03F7/20
摘要:
A near-field photomask includes a light shield film having openings to constitute a light shield portion. The photomask can be used to expose an exposure target with near-field light generated through the openings. The openings formed in the light shield film include two or more parallel rows of first slit openings each having a width smaller than 100 nm, and two or more parallel rows of second slit openings each having a width smaller than 100 nm, which extend perpendicularly to the rows of first slit openings while interlinking at least two of the rows of first slit openings. A near-field exposure apparatus includes the near-field photomask with a positioning unit and a source for illuminating polarized light parallel to the first slit openings for forming a latent-dot-image on an exposure target only where a second slit opening crosses the light shield portion on the near-field photomak.
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