发明授权
US07264340B2 Piezoelectric actuator and ink-jet head, and ink-jet recorder 失效
压电致动器和喷墨头,以及喷墨记录器

Piezoelectric actuator and ink-jet head, and ink-jet recorder
摘要:
A piezoelectric actuator is constructed by forming a common electrode 27 of Cr, a piezoelectric layer 29 of Pb(Zr,Ti)O3, a cover layer 31 of BaTiO3, and an individual electrode 33 of Pt in this order into a laminate. The thickness of the piezoelectric layer 29 in the lamination direction (T1) and the thickness of the cover layer 31 in the lamination direction (T2) satisfy the relationship of 0.08≦T2/T1≦1. The relative dielectric constant of the piezoelectric layer 29 (εr1) and the relative dielectric constant of the cover layer 31 (εr2) satisfy the relationship of εr2/εr1≧0.2.
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