Invention Grant
- Patent Title: Method of fabricating optoelectronic integrated circuit chip
- Patent Title (中): 制造光电集成电路芯片的方法
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Application No.: US11012699Application Date: 2004-12-16
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Publication No.: US07264987B2Publication Date: 2007-09-04
- Inventor: Eun Soo Nam , Ho Young Kim , Myoung Sook Oh , Dong Yun Jung , Seon Eui Hong , Kyoung Ik Cho
- Applicant: Eun Soo Nam , Ho Young Kim , Myoung Sook Oh , Dong Yun Jung , Seon Eui Hong , Kyoung Ik Cho
- Applicant Address: KR Daejeon-Shi
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon-Shi
- Agency: Lowe Hauptman & Berner LLP
- Priority: KR10-2003-0094753 20031222; KR10-2004-0057043 20040722
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method of fabricating an optoelectronic integrated circuit chip. In particular, a method of fabricating an optoelectronic integrated circuit chip is provided, in which an optical absorption layer of a wave-guide type optical detector is grown to be thicker than a collector layer of a hetero-junction bipolar transistor by using a selective area growth by metal organic chemical vapor deposition (MOCVD) method, and the wave-guide type optical detector and the hetero-junction bipolar transistor are integrated as a single chip on a semi-insulated InP substrate, thereby readily realizing the wave-guide type optical detector improved in quantum efficiency and having the ultra-high speed characteristics.
Public/Granted literature
- US20050170549A1 Method of fabricating optoelectronic integrated circuit chip Public/Granted day:2005-08-04
Information query
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