发明授权
US07265405B2 Method for fabricating contacts for integrated circuits, and semiconductor component having such contacts
有权
用于制造用于集成电路的触点的方法,以及具有这种触点的半导体部件
- 专利标题: Method for fabricating contacts for integrated circuits, and semiconductor component having such contacts
- 专利标题(中): 用于制造用于集成电路的触点的方法,以及具有这种触点的半导体部件
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申请号: US10754439申请日: 2004-01-09
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公开(公告)号: US07265405B2公开(公告)日: 2007-09-04
- 发明人: Kae-Horng Wang , Ralf Staub , Matthias Krönke
- 申请人: Kae-Horng Wang , Ralf Staub , Matthias Krönke
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Patterson & Sheridan, L.L.P.
- 优先权: DE10133873 20010712
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
One (or more) contacts are produced on one or more active areas of a semiconductor wafer, it being possible for one or more isolated control lines to be arranged on the active areas with which contact is to be made. The control lines may, for example, be gate lines. The semiconductor component is fabricated in the following way: application of a polysilicon layer to the semiconductor wafer, patterning of the polysilicon layer, in order to produce a polysilicon contact above the active area, the polysilicon contact at least partly covering the two control lines, application of a first insulator layer to the semiconductor wafer, with the polysilicon contact being embedded, partial removal of the first insulator layer, so that at least the upper surface of the polysilicon contact is uncovered, and application of a metal layer to the semiconductor wafer in order to make electrical contact with the polysilicon contact.
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