发明授权
US07265413B2 Semiconductor memory with vertical memory transistors and method for fabricating it
有权
具有垂直存储晶体管的半导体存储器及其制造方法
- 专利标题: Semiconductor memory with vertical memory transistors and method for fabricating it
- 专利标题(中): 具有垂直存储晶体管的半导体存储器及其制造方法
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申请号: US11073205申请日: 2005-03-05
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公开(公告)号: US07265413B2公开(公告)日: 2007-09-04
- 发明人: Franz Hofmann , Erhard Landgraf , Richard Johannes Luyken , Thomas Schulz , Michael Specht
- 申请人: Franz Hofmann , Erhard Landgraf , Richard Johannes Luyken , Thomas Schulz , Michael Specht
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Patterson & Sheridan, L.L.P.
- 优先权: DE10241172 20020905
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
The invention relates to a semiconductor memory having a multiplicity of memory cells and a method for forming the memory cells. The semiconductor memory generally includes a semiconductor layer arranged on a substrate surface that includes a normally positioned step between a deeper region and a higher region. The semiconductor memory further includes doped contact regions, channel regions, a trapping layer arranged on a gate oxide layer, and at least one gate electrode. The method for forming the memory cells includes patterning a semiconductor layer to form a deeper semiconductor region and a higher semiconductor region having a step positioned between the regions. The method further includes forming a first oxide layer and a trapping layer, and then removing portions of the trapping layer and the first oxide layer and applying a second oxide layer at least regions of a doped region, the trapping layer, and the step area, and applying a gate electrode to the second oxide layer and doping, at least in regions, of the deeper semiconductor region and the higher semiconductor region to form a deeper contact region and a higher contact region.
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