Invention Grant
- Patent Title: Aluminum nitride powder, method for producing the same and use thereof
- Patent Title (中): 氮化铝粉末及其制造方法及其用途
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Application No.: US11174723Application Date: 2005-07-06
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Publication No.: US07267808B2Publication Date: 2007-09-11
- Inventor: Masato Yamazaki , Kenshi Mitsuishi , Isao Harada , Masao Tanaka , Kohichi Haruta , Koji Watari , Jin-yu Qiu , Yuji Hotta , Kimiyasu Sato
- Applicant: Masato Yamazaki , Kenshi Mitsuishi , Isao Harada , Masao Tanaka , Kohichi Haruta , Koji Watari , Jin-yu Qiu , Yuji Hotta , Kimiyasu Sato
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Mitsui Chemicals, Inc.,Advanced Industrial Science and Technology
- Current Assignee: Mitsui Chemicals, Inc.,Advanced Industrial Science and Technology
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2004-202498 20040708; JP2005-075540 20050316
- Main IPC: C01B21/072
- IPC: C01B21/072 ; C04B35/581

Abstract:
The present invention is to produce an aluminum nitride powder which is turned into a sintered body at a temperature of not more than 1600° C., thereby obtaining a sintered aluminum nitride in which the density and thermal conductivity are high and which can be properly used as a substrate material.Using a vapor phase reaction apparatus shown in FIG. 1, ammonia gas was fed from a reactor 2 heated at from 300 to 500° C. and maintained at that temperature by a heating section 1 via a feeding tube 4 while being regulated by a flow regulator 3. At the same time, while being regulated by the flow regulator 5, nitrogen gas containing an organic aluminum compound is fed via a feeding tube 6 to obtain an aluminum nitride powder. The aluminum nitride powder is subjected to a heat treatment at from 1100 to 1500° C. in a reducing gas atmosphere and/or an inert gas atmosphere to obtain an aggregate aluminum nitride powder. The aggregate aluminum nitride powder is subjected to a mechanical treatment to obtain an aluminum nitride powder in which the specific surface area value is not less than 30 m2/g and a ratio of an average particle diameter to a particle diameter in terms of the specific surface area is not more than 10.
Public/Granted literature
- US20060018818A1 Aluminum nitride powder, method for producing the same and use thereof Public/Granted day:2006-01-26
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