Invention Grant
US07269469B2 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
有权
用于调度半导体制造工具的制造作业的系统和方法
- Patent Title: System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
- Patent Title (中): 用于调度半导体制造工具的制造作业的系统和方法
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Application No.: US10796646Application Date: 2004-03-09
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Publication No.: US07269469B2Publication Date: 2007-09-11
- Inventor: Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
- Applicant: Jui-An Shih , Ko-Pin Chang , Hui-Tang Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.
Public/Granted literature
- US20050203654A1 System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool Public/Granted day:2005-09-15
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