中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

9 records (took 0.014 seconds)

    Tank scheduling optimization for replicated chemical in a semiconductor manufacturing wet bench
    1.
    发明申请
    Tank scheduling optimization for replicated chemical in a semiconductor manufacturing wet bench 审中-公开
    在半导体制造湿式工作台中的复制化学品的罐调度优化

    公开(公告)号：US20050177267A1

    公开(公告)日：2005-08-11

    申请号：US10775802

    申请日：2004-02-10

    Applicant: Yu-Ling Chang ,  Chen Hsiung ,  Hui-Tang Liu

    Inventor： Yu-Ling Chang ,  Chen Hsiung ,  Hui-Tang Liu

    IPC: G06F17/50 ,  G06F19/00

    CPC classification number: H01L21/67271 ,  H01L21/6704

    Abstract: The present disclosure provides a system and method for identifying a tank containing a liquid from N number of tanks in a semiconductor manufacturing facility into which a batch of semiconductor products may be processed. An incoming batch of products to be processed in a predetermined number of tanks housing the liquid is received. A batch number associated with the batch is identified. A recipe index is determined using a relationship based on, for example, the modulus of N divided by the batch number, and a tank into which the batch is to be processed is determined using another relationship based at least in part on the recipe index and the predetermined number of tanks.

    Abstract translation: 本公开提供了一种用于在半导体制造设备中识别含有来自N个罐的液体的罐的系统和方法，一批半导体产品可以被加工到该罐中。 在容纳液体的预定数量的容器中接收待加工的一批产品。 识别与该批次相关联的批号。 使用基于例如N的模数除以批号的关系来确定配方指数，并且至少部分地基于配方指数来确定要处理批次的罐，并且 预定数量的坦克。

    Integrated transport system
    2.
    发明申请
    Integrated transport system 有权

    公开(公告)号：US20050075753A1

    公开(公告)日：2005-04-07

    申请号：US10677867

    申请日：2003-10-02

    Applicant: Ko-Pin Chang ,  Jui-An Shih ,  Hui-Tang Liu

    Inventor： Ko-Pin Chang ,  Jui-An Shih ,  Hui-Tang Liu

    IPC: B23Q41/00 ,  B65G1/02 ,  B65G49/00 ,  B65G49/07 ,  G06F7/00 ,  G06Q10/00

    CPC classification number: G06Q10/047 ,  G06Q10/08 ,  Y10S414/14

    Abstract: A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.

    System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
    4.
    发明授权
    System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
    用于调度半导体制造工具的制造作业的系统和方法

    公开(公告)号：US07269469B2

    公开(公告)日：2007-09-11

    申请号：US10796646

    申请日：2004-03-09

    Applicant: Jui-An Shih ,  Ko-Pin Chang ,  Hui-Tang Liu

    Inventor： Jui-An Shih ,  Ko-Pin Chang ,  Hui-Tang Liu

    IPC: G06F19/00

    CPC classification number: G06Q10/06 ,  G05B19/41865 ,  G05B2219/32254 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/86

    Abstract: A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.

    Abstract translation: 提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。 在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。 响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

    Integrated transport system
    7.
    发明授权
    Integrated transport system 有权
    综合运输系统

    公开(公告)号：US06931303B2

    公开(公告)日：2005-08-16

    申请号：US10677867

    申请日：2003-10-02

    Applicant: Ko-Pin Chang ,  Jui-An Shih ,  Hui-Tang Liu

    Inventor： Ko-Pin Chang ,  Jui-An Shih ,  Hui-Tang Liu

    IPC: B23Q41/00 ,  B65G1/02 ,  B65G49/00 ,  B65G49/07 ,  G06F7/00 ,  G06Q10/00

    CPC classification number: G06Q10/047 ,  G06Q10/08 ,  Y10S414/14

    Abstract: A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.

    Abstract translation: 制造系统内的运输系统。 制造系统包括多个工具托架，每个工具托架具有用于加工制品的多个加工工具。 运输系统包含多个内部运输子系统，间隔运输子系统，多个储料器以及至少一个连接子系统。 每个内部运输子系统专用于在特定工具托架内运输物品。 连接工具托架的间隔运输子系统在工具托架之间运输物品。 位于intrabay和interbay运输子系统之间的储料器在处理和转移物品之间的物品之间存储物品在树枝间和运输间子系统之间。 连接子系统位于两个相邻的内部传输子系统之间，可在两个相应的工具托架之间提供直接传输。

    System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
    9.
    发明申请
    System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool 有权
    用于调度半导体制造工具的制造作业的系统和方法

    公开(公告)号：US20050203654A1

    公开(公告)日：2005-09-15

    申请号：US10796646

    申请日：2004-03-09

    Applicant: Jui-An Shih ,  Ko-Pin Chang ,  Hui-Tang Liu

    Inventor： Jui-An Shih ,  Ko-Pin Chang ,  Hui-Tang Liu

    IPC: G06F19/00

    CPC classification number: G06Q10/06 ,  G05B19/41865 ,  G05B2219/32254 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/86

    Abstract: A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a status of the tool to determine when a predefined event occurs. A position in a buffer in which to place the monitor job may be identified in response to the event occurring, where placing the monitor job in the identified position will cause the monitor job to be executed at a correct time.

    Abstract translation: 提供了一种系统和方法，用于调度半导体制造环境中的工具的监视作业并优化在这种环境中的作业的调度。 在一个示例中，该方法包括接收监视作业并监视工具的状态以确定何时发生预定事件。 响应于发生的事件，可以识别在其中放置监视作业的缓冲器中的位置，其中将监视作业置于识别位置将导致监视作业在正确的时间被执行。

Patent Agency Ranking