发明授权
- 专利标题： Insoluble anode with an auxiliary electrode
- 专利标题（中）： 具有辅助电极的不溶性阳极
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申请号： US10664277申请日： 2003-09-17
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公开(公告)号： US07273535B2公开(公告)日： 2007-09-25
- 发明人: Nicolay Y. Kovarsky , Dmitry Lubomirsky , Yevgeniy (Eugene) Rabinovich
- 申请人： Nicolay Y. Kovarsky , Dmitry Lubomirsky , Yevgeniy (Eugene) Rabinovich
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： C25D5/00
- IPC分类号： C25D5/00 ; C25D17/00 ; C25B9/00
摘要：
A method and apparatus for plating a metal onto a substrate. The apparatus includes a fluid basin configured to contain a plating solution, an anode fluid volume positioned in a lower portion of the fluid basin, a cathode fluid volume positioned in an upper portion of the fluid basin, an ionic membrane positioned to separate the anode fluid volume from the cathode fluid volume, a plating electrode centrally positioned in the anode fluid volume, and a deplating electrode positioned adjacent the plating electrode in the anode fluid volume.
公开/授权文献
- US20050056538A1 Insoluble anode with an auxiliary electrode 公开/授权日：2005-03-17
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