发明授权
US07274051B2 Field effect transistor (FET) having wire channels and method of fabricating the same
有权
具有线通道的场效应晶体管(FET)及其制造方法
- 专利标题: Field effect transistor (FET) having wire channels and method of fabricating the same
- 专利标题(中): 具有线通道的场效应晶体管(FET)及其制造方法
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申请号: US11074900申请日: 2005-03-09
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公开(公告)号: US07274051B2公开(公告)日: 2007-09-25
- 发明人: Sungmin Kim , Ming Li , Eungjung Yoon
- 申请人: Sungmin Kim , Ming Li , Eungjung Yoon
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2004-0071225 20040907
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
In a field effect transistor (FET), and a method of fabricating the same, the FET includes a semiconductor substrate, source and drain regions formed on the semiconductor substrate, a plurality of wire channels electrically connecting the source and drain regions, the plurality of wire channels being arranged in two columns and at least two rows, and a gate dielectric layer surrounding each of the plurality of wire channels and a gate electrode surrounding the gate dielectric layer and each of the plurality of wire channels.
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