发明授权
US07274051B2 Field effect transistor (FET) having wire channels and method of fabricating the same 有权
具有线通道的场效应晶体管(FET)及其制造方法

Field effect transistor (FET) having wire channels and method of fabricating the same
摘要:
In a field effect transistor (FET), and a method of fabricating the same, the FET includes a semiconductor substrate, source and drain regions formed on the semiconductor substrate, a plurality of wire channels electrically connecting the source and drain regions, the plurality of wire channels being arranged in two columns and at least two rows, and a gate dielectric layer surrounding each of the plurality of wire channels and a gate electrode surrounding the gate dielectric layer and each of the plurality of wire channels.
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