发明授权
US07278313B2 Structures for supporting vibrators and devices for measuring physical quantities
有权
用于支撑振动器的结构和用于测量物理量的装置
- 专利标题： Structures for supporting vibrators and devices for measuring physical quantities
- 专利标题（中）： 用于支撑振动器的结构和用于测量物理量的装置
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申请号： US11215767申请日： 2005-08-30
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公开(公告)号： US07278313B2公开(公告)日： 2007-10-09
- 发明人: Shigeki Hayashi , Takayuki Kikuchi , Yusuke Kinoshita
- 申请人： Shigeki Hayashi , Takayuki Kikuchi , Yusuke Kinoshita
- 申请人地址： JP Nagoya City JP Shinjuku-Ku
- 专利权人： NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人： NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人地址： JP Nagoya City JP Shinjuku-Ku
- 代理机构： Burr & Brown
- 优先权： JPP2004-263320 20040910; JPP2005-207260 20050715
- 主分类号： G01P9/04
- IPC分类号： G01P9/04
摘要：
It is provided a supporting structure having a substrate 12 and bonding wires 14A, 14B fixed onto the substrate 12 and connected to a vibrator 1. The substrate 12 has a pair of fixed portions 12a opposing each other and a pair of non-fixed portions 12b opposing each other. The fixed portions 12a and the non-fixed portions 12b together define a through hole 13A in the substrate 12. The vibrator 1 is supported with the bonding wire so that the vibrator 1 is not directly contacted with the substrate 12. The bonding wires 14A, 14B are fitted to the fixed portion 12a and is not fitted to any of the non-fixed portions 12b.
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