发明授权
US07281741B2 End-effectors for handling microelectronic workpieces 有权
用于处理微电子工件的终端效应器

End-effectors for handling microelectronic workpieces
摘要:
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
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