发明授权
- 专利标题: End-effectors for handling microelectronic workpieces
- 专利标题(中): 用于处理微电子工件的终端效应器
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申请号: US10195137申请日: 2002-07-11
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公开(公告)号: US07281741B2公开(公告)日: 2007-10-16
- 发明人: Daniel J. Woodruff , Thomas H. Oberlitner , Randy A. Harris , James J. Erickson , Douglas W. Carr
- 申请人: Daniel J. Woodruff , Thomas H. Oberlitner , Randy A. Harris , James J. Erickson , Douglas W. Carr
- 申请人地址: US MT Kalispell
- 专利权人: Semitool, Inc.
- 当前专利权人: Semitool, Inc.
- 当前专利权人地址: US MT Kalispell
- 代理机构: Perkins Coie LLP
- 主分类号: B66C1/42
- IPC分类号: B66C1/42
摘要:
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
公开/授权文献
- US20030082042A1 End-effectors for handling microelectronic workpieces 公开/授权日:2003-05-01
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