发明授权
- 专利标题: Replaceable plate expanded thermal plasma apparatus and method
- 专利标题(中): 可更换板膨胀热等离子体装置及方法
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申请号: US10655350申请日: 2003-09-05
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公开(公告)号: US07282244B2公开(公告)日: 2007-10-16
- 发明人: Mark Schaepkens , Charles Dominic Iacovangelo , Thomas Miebach
- 申请人: Mark Schaepkens , Charles Dominic Iacovangelo , Thomas Miebach
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Andrew J. Caruso; William E. Powell, III
- 主分类号: H05H1/24
- IPC分类号: H05H1/24
摘要:
The present invention provides a deposition process for plasma enhanced chemical vapor deposition of a coating on a substrate. The process comprises detennining a target process condition within a chamber of an expanding thermal plasma generator; the generator comprising a cathode, a replaceable cascade plate and an anode comprising a concentric orifice; and thereafter replacing the cascade plate with another plate having a configured orifice to effect the identified target process condition. The plasma is then generated at the target process condition by providing a plasma gas to the plasma generator and ionizing the plasma gas in an arc between cathode and anode within the generator and expanding the gas as a plasma onto a substrate in a deposition chamber.
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