发明授权
US07283690B2 Optical waveguide device, method of manufacturing the same, and optical communication equipment 失效
光波导器件及其制造方法以及光通信设备

Optical waveguide device, method of manufacturing the same, and optical communication equipment
摘要:
An optical wave guide device is manufactured by bonding an optical wave guide to an optical modulator through an upper cladding layer. The optical wave guide includes a glass substrate, a lower cladding layer and cores, and the optical modulator includes elements (heaters), which are disposed on the lower surface of a glass substrate, for modulating the light propagating in the cores, and electrodes and wire bond pads which are disposed on the front surface thereof. The elements are connected to the electrodes via through-holes. With this arrangement, there can be provided an optical waveguide device, in which cores are not degraded in manufacturing processes and elements for modulating the light propagating in the cores are unlikely to be exfoliated.
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