发明授权
- 专利标题： Middle layer of die structure that comprises a cavity that holds an alkali metal
- 专利标题（中）： 包含保持碱金属的空腔的模具结构的中间层
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申请号： US10831812申请日： 2004-04-26
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公开(公告)号： US07292111B2公开(公告)日： 2007-11-06
- 发明人: Henry C. Abbink , William P. Debley , Christine E. Geosling , Daryl K. Sakaida , Robert E. Stewart
- 申请人： Henry C. Abbink , William P. Debley , Christine E. Geosling , Daryl K. Sakaida , Robert E. Stewart
- 申请人地址： US CA Los Angeles
- 专利权人： Northrop Grumman Corporation
- 当前专利权人： Northrop Grumman Corporation
- 当前专利权人地址： US CA Los Angeles
- 代理机构： Carmen B. Patti & Assoc., LLC
- 主分类号： H01J25/50
- IPC分类号： H01J25/50
摘要：
An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.
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