Invention Grant
US07294842B2 Camera head for fast reproduction of a vacuum UV spectrometer spectrum
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相机头用于快速再现真空紫外光谱仪谱
- Patent Title: Camera head for fast reproduction of a vacuum UV spectrometer spectrum
- Patent Title (中): 相机头用于快速再现真空紫外光谱仪谱
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Application No.: US10492003Application Date: 2002-10-04
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Publication No.: US07294842B2Publication Date: 2007-11-13
- Inventor: Wolfgang Biel , Alfred Scholl , Norbert Sandri , Gerd Telemann , Dietmar Brinkmann
- Applicant: Wolfgang Biel , Alfred Scholl , Norbert Sandri , Gerd Telemann , Dietmar Brinkmann
- Agency: Schweitzer Cornman Gross & Bondell LLP
- Priority: DE10150071 20011010
- International Application: PCT/EP02/11153 WO 20021004
- International Announcement: WO03/034006 WO 20030424
- Main IPC: G01T5/08
- IPC: G01T5/08

Abstract:
An apparatus for measuring the transport time of impurity particles in a plasma includes a spectrometer, a system for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as a display screen that presents the integrated charge as a series of spectral lines. The integrator circuit is assembled from discrete components. Thus, the transport of plasma impurities can be properly measured.
Public/Granted literature
- US20050105086A1 Camera head for fast reproduction of a vaccum uv spectrometer spectrum Public/Granted day:2005-05-19
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