公开(公告)号：US07294842B2

公开(公告)日：2007-11-13

申请号：US10492003

申请日：2002-10-04

Applicant: Wolfgang Biel ,  Alfred Scholl ,  Norbert Sandri ,  Gerd Telemann ,  Dietmar Brinkmann

Inventor： Wolfgang Biel ,  Alfred Scholl ,  Norbert Sandri ,  Gerd Telemann ,  Dietmar Brinkmann

IPC: G01T5/08

CPC classification number: G01J1/58 ,  G01J3/2803 ,  G01J3/2889

Abstract: An apparatus for measuring the transport time of impurity particles in a plasma includes a spectrometer, a system for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as a display screen that presents the integrated charge as a series of spectral lines. The integrator circuit is assembled from discrete components. Thus, the transport of plasma impurities can be properly measured.

Abstract translation: 用于测量等离子体中的杂质颗粒的传输时间的装置包括光谱仪，用于空间分辨转换成离开光谱仪的光的电荷的系统，用于电荷的空间分辨一体化的积分器电路，以及 将集成电荷呈现为一系列光谱线的显示屏幕。 积分器电路由分立元件组装。 因此，可以适当地测量等离子体杂质的输送。

公开(公告)号：US20050105086A1

公开(公告)日：2005-05-19

申请号：US10492003

申请日：2002-10-04

Applicant: Wolfgang Biel ,  Alfred Scholl ,  Norbert Sandri ,  Gerd Telemann ,  Dietmar Brinkmann

Inventor： Wolfgang Biel ,  Alfred Scholl ,  Norbert Sandri ,  Gerd Telemann ,  Dietmar Brinkmann

IPC: G01J3/443 ,  G01J1/02 ,  G01J1/42 ,  G01J1/44 ,  G01J3/28 ,  G01J3/36

CPC classification number: G01J1/58 ,  G01J3/2803 ,  G01J3/2889

Abstract: The invention relates to an apparatus comprising a spectrometer, means for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as means for displaying the charge that is integrated dependent on the position. The integrator circuit is assembled from discrete components. Thus, the transport of plasma impurities can be properly measured.

Abstract translation: 本发明涉及一种装置，包括一个光谱仪，用于空间分辨转换成离开光谱仪的光的电荷的装置，用于空间分辨的电荷积分的积分电路，以及用于显示积分依赖的电荷的装置 在位置上 积分器电路由分立元件组装。 因此，可以适当地测量等离子体杂质的输送。