发明授权
- 专利标题: Position sensor
- 专利标题(中): 位置传感器
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申请号: US10771992申请日: 2004-02-03
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公开(公告)号: US07298500B2公开(公告)日: 2007-11-20
- 发明人: Hiroshi Sato , Kazuhiko Mishima
- 申请人: Hiroshi Sato , Kazuhiko Mishima
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Morgan & Finnegan LLP
- 优先权: JP2003-026541 20030203
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in a partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
公开/授权文献
- US20040165195A1 Position sensor 公开/授权日:2004-08-26
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