Invention Grant
US07300038B2 Method and apparatus to help promote contact of gas with vaporized material
有权
有助于促进气体与气化材料接触的方法和装置
- Patent Title: Method and apparatus to help promote contact of gas with vaporized material
- Patent Title (中): 有助于促进气体与气化材料接触的方法和装置
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Application No.: US10858509Application Date: 2004-06-01
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Publication No.: US07300038B2Publication Date: 2007-11-27
- Inventor: John N. Gregg , Scott L. Battle , Jeffrey I. Banton , Donn K. Naito , Ravi Laxman
- Applicant: John N. Gregg , Scott L. Battle , Jeffrey I. Banton , Donn K. Naito , Ravi Laxman
- Applicant Address: US CT Danbury
- Assignee: Advanced Technology Materials, Inc.
- Current Assignee: Advanced Technology Materials, Inc.
- Current Assignee Address: US CT Danbury
- Agency: Intellectual Property/Technology Law
- Agent Vincent K. Gustafson; Maggie Chappuis
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
Structure helps support material in a container with an increased exposed surface area to help promote contact of a gas with vaporized material. For at least one disclosed embodiment, the structure may help support material for vaporization in the same form as when the material is placed at the structure. For at least one disclosed embodiment, the structure may help support material with an increased exposed surface area relative to a maximum exposed surface area the material could have at rest in the container absent the structure. For at least one disclosed embodiment, the structure may define one or more material support surfaces in an interior region of the container in addition to a bottom surface of the interior region of the container. For at least one disclosed embodiment, the structure may define in an interior region of the container one or more material support surfaces having a total surface area greater than a surface area of a bottom surface of the interior region of the container. For at least one disclosed embodiment, gas resulting from contact of received gas with vaporized material may be delivered to atomic layer deposition (ALD) process equipment.
Public/Granted literature
- US20050006799A1 Method and apparatus to help promote contact of gas with vaporized material Public/Granted day:2005-01-13
Information query
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