发明授权
US07300335B2 Glass substrate for data recording medium, manufacturing method thereof and polishing pad used in the method
有权
用于数据记录介质的玻璃基板，其制造方法和该方法中使用的抛光垫
- 专利标题： Glass substrate for data recording medium, manufacturing method thereof and polishing pad used in the method
- 专利标题（中）： 用于数据记录介质的玻璃基板，其制造方法和该方法中使用的抛光垫
-
申请号： US10765459申请日： 2004-02-11
-
公开(公告)号： US07300335B2公开(公告)日： 2007-11-27
- 发明人: Hirokazu Tajima , Tamaki Horisaka
- 申请人： Hirokazu Tajima , Tamaki Horisaka
- 申请人地址： JP Tokyo
- 专利权人： Hoya Corporation
- 当前专利权人： Hoya Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Marsh Fischmann & Breyfogle
- 优先权： JP2003-034094 20030212
- 主分类号： B24B7/30
- IPC分类号： B24B7/30 ; B24D11/00
摘要：
A polishing pad is used when a surface of a glass workpiece is polished for manufacturing a glass substrate of information recording medium. The polishing pad has a nap layer. The nap layer includes an inner layer that contains a plurality of closed cells, and an outer layer. A plurality of pores are formed on the surface of the outer layer. The sizes of the pores are minute compared to those of the closed cells.
公开/授权文献
信息查询
