公开(公告)号：US06852003B2

公开(公告)日：2005-02-08

申请号：US10807676

申请日：2004-03-24

申请人： Hirokazu Tajima ,  Tamaki Horisaka

发明人： Hirokazu Tajima ,  Tamaki Horisaka

IPC分类号： B24B1/00 ,  B24B37/20 ,  B24B37/24 ,  B24B37/27 ,  B24B37/28 ,  B24B49/12 ,  C03C19/00 ,  G11B5/84 ,  B24B49/00

CPC分类号： B24B37/105 ,  B24B49/12 ,  G11B5/8404

摘要： A glass substrate for a data recording medium is manufactured by using a tabular carrier with circular holes formed therein, housing disk-shaped glass workpieces in the circular holes of this carrier, sliding polishing pads over the surface of the carrier and the principal surfaces of the glass workpieces and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces of the glass workpieces is reduced to a predetermined value or less. The height (NRa) of micro-waviness of the principal surfaces is a value dependent on the surface roughness of the polishing pad and the surface roughness of this polishing pad is a value dependent on the surface roughness of the carrier. A glass substrate for a data recording medium is manufactured by reducing the surface roughness (Ra) of the carrier to 0.08 μm or less and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces measured using a three-dimensional surface structure analysis microscope whose measuring wavelength (λ) is set to 0.2 to 1.4 mm is reduced to 0.12 nm or less.

摘要翻译： 用于数据记录介质的玻璃基板通过使用其中形成有圆形孔的平板状载体制造，在该载体的圆形孔中容纳盘形玻璃工件，在载体表面上滑动抛光垫和主体表面 玻璃工件并抛光玻璃工件，直到玻璃工件的主表面上的微波纹的高度（NRa）降低到预定值或更小。 主表面的微波纹的高度（NRa）是取决于抛光垫的表面粗糙度的值，并且该抛光垫的表面粗糙度是取决于载体的表面粗糙度的值。 通过将载体的表面粗糙度（Ra）减小到0.08μm以下，并研磨玻璃工件直到使用三维测量法测量的主面上的微波纹的高度（NRa）为止，制造用于数据记录介质的玻璃基板。 测量波长（λ）设定为0.2〜1.4mm的三维表面结构分析用显微镜，减小到0.12nm以下。

公开(公告)号：US07300335B2

公开(公告)日：2007-11-27

申请号：US10765459

申请日：2004-02-11

申请人： Hirokazu Tajima ,  Tamaki Horisaka

发明人： Hirokazu Tajima ,  Tamaki Horisaka

IPC分类号： B24B7/30 ,  B24D11/00

CPC分类号： B24B37/08 ,  B24B37/22 ,  B24B37/24 ,  B24D3/26

摘要： A polishing pad is used when a surface of a glass workpiece is polished for manufacturing a glass substrate of information recording medium. The polishing pad has a nap layer. The nap layer includes an inner layer that contains a plurality of closed cells, and an outer layer. A plurality of pores are formed on the surface of the outer layer. The sizes of the pores are minute compared to those of the closed cells.

摘要翻译： 当玻璃工件的表面被抛光以制造信息记录介质的玻璃基板时，使用抛光垫。 抛光垫具有薄层。 绒面层包括含有多个闭孔的内层和外层。 在外层的表面上形成多个孔。 与闭孔相比，孔的尺寸是微小的。

公开(公告)号：US20080220700A1

公开(公告)日：2008-09-11

申请号：US12098999

申请日：2008-04-07

申请人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

发明人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

IPC分类号： B24B41/06

CPC分类号： B24B53/017 ,  B24B37/042 ,  G11B5/8404

摘要： A glass substrate for an information recording medium is manufactured by polishing the surface of a raw material glass plate. The polishing of the raw material glass plate is divided into a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The first polishing process uses a polishing pad made of a synthetic resin foam and slides the polishing pad on the raw material glass plate surface while supplying a polishing agent to roughly polish the surface. A pad dressing process is performed on the polishing pad before being used in the first polishing process. The pad dressing process polishes the surface of the polishing pad by sliding the polishing pad on a pad dresser including abrasive grains.

摘要翻译： 通过对原料玻璃板的表面进行研磨来制造信息记录介质用玻璃基板。 将原料玻璃板的研磨分为进行第一研磨工序的步骤，以将原料玻璃板的表面大致抛光为光滑的工序，以及进行第二研磨工序的步骤，以粗略地研磨粗面玻璃的表面 抛光原料玻璃板更平滑。 第一抛光工艺使用由合成树脂泡沫制成的抛光垫，并将抛光垫在原料玻璃板表面上滑动，同时提供抛光剂以大致抛光表面。 在第一抛光工艺中使用之前，在抛光垫上进行衬垫修整处理。 抛光垫修整工艺通过将抛光垫滑动到包括磨料颗粒的砂轮修整器上来抛光抛光垫的表面。

公开(公告)号：US07500904B2

公开(公告)日：2009-03-10

申请号：US10530644

申请日：2003-12-25

申请人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

发明人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

IPC分类号： B24B1/00

CPC分类号： B24B53/017 ,  B24B37/042 ,  G11B5/8404

摘要： A glass substrate for an information recording medium is manufactured by polishing the surface of a raw material glass plate. The polishing of the raw material glass plate is divided into a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The first polishing process uses a polishing pad made of a synthetic resin foam and slides the polishing pad on the raw material glass plate surface while supplying a polishing agent to roughly polish the surface. A pad dressing process is performed on the polishing pad before being used in the first polishing process. The pad dressing process polishes the surface of the polishing pad by sliding the polishing pad on a pad dresser including abrasive grains.

摘要翻译： 通过对原料玻璃板的表面进行研磨来制造信息记录介质用玻璃基板。 将原料玻璃板的研磨分为进行第一研磨工序的步骤，以将原料玻璃板的表面大致抛光为光滑的工序，以及进行第二研磨工序的步骤，以粗略地研磨粗面玻璃的表面 抛光原料玻璃板更平滑。 第一抛光工艺使用由合成树脂泡沫制成的抛光垫，并将抛光垫在原料玻璃板表面上滑动，同时提供抛光剂以大致抛光表面。 在第一抛光工艺中使用之前，在抛光垫上进行衬垫修整处理。 抛光垫修整工艺通过将抛光垫滑动到包括磨料颗粒的砂轮修整器上来抛光抛光垫的表面。

公开(公告)号：US07429209B2

公开(公告)日：2008-09-30

申请号：US10530647

申请日：2003-12-25

申请人： Tamaki Horisaka ,  Koichi Suzuki ,  Akihide Minami

发明人： Tamaki Horisaka ,  Koichi Suzuki ,  Akihide Minami

IPC分类号： B24B1/00

CPC分类号： B24B37/042 ,  G11B5/8404

摘要： An information recording medium glass substrate manufactured by polishing the surface of a raw material glass plate. The polishing is divided into two steps, a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The second polishing process, using a polishing pad made of foam, is divided into two stages, pre-polishing with a polishing agent including abrasive grains of cerium oxide and post-polishing with a polishing agent including abrasive grains of silicon oxide. A rinsing process is performed between the pre-polishing and the post-polishing to rinse the raw material glass plate after the pre-polishing with a washing liquid to wash away the abrasive grains collected in the polishing pad in pre-polishing during the rinsing process.

摘要翻译： 通过对原料玻璃板的表面进行研磨而制造的信息记录介质玻璃基板。 抛光分为两个步骤，用于执行第一抛光处理以粗糙地将原料玻璃板的表面抛光为光滑的步骤以及用于进行第二抛光工艺以精细抛光粗抛光原料的表面的步骤 玻璃板更平滑。 使用由泡沫制成的抛光垫的第二抛光工艺被分为两个阶段，用包括氧化铈磨粒的抛光剂进行预抛光，并用包括氧化硅磨粒的抛光剂进行后抛光。 在预抛光和后抛光之间进行漂洗处理，以在用抛光垫预先抛光后冲洗原料玻璃板，以便在漂洗过程中预抛光时洗去在抛光垫中收集的磨料颗粒 。

公开(公告)号：US20050223744A1

公开(公告)日：2005-10-13

申请号：US11149510

申请日：2005-06-10

申请人： Tamaki Horisaka ,  Kazuya Fujino ,  Kensuke Matsuno ,  Eiji Okuda

发明人： Tamaki Horisaka ,  Kazuya Fujino ,  Kensuke Matsuno ,  Eiji Okuda

IPC分类号： C03B29/02 ,  C03C23/00 ,  G11B5/73 ,  G11B5/84 ,  G11B7/253 ,  G11B7/26 ,  G11B11/105 ,  G11B23/00 ,  B32B3/02 ,  C03B29/00

CPC分类号： C03C23/0025 ,  G11B5/7315 ,  G11B5/8404 ,  G11B7/2531 ,  G11B7/26 ,  G11B11/10582 ,  G11B11/10586 ,  G11B23/0021 ,  Y10T428/218

摘要： A glass substrate for a data recording medium is disk-shaped and has a circular bore at the center portion. At least one of an inner circumferential end surface and an outer circumferential end surface is smooth. The smooth surface is formed by exposing at least one of the inner circumferential end surface and the outer circumferential end surface of a glass disk to a laser beam. During laser machining, the end surface of the glass disk that is exposed to the laser beam is heated and melted. Therefore, minute cracks, formed on the end surface of the glass disk before the laser machining, are eliminated. As a result, the strength of the glass substrate is maintained without a chemical strengthening treatment. This eliminates disadvantages caused by the chemical strengthening step.

摘要翻译： 用于数据记录介质的玻璃基板是盘形的，并且在中心部分具有圆形孔。 内周端面和外周端面中的至少一个是平滑的。 通过将玻璃盘的内周端面和外周端面中的至少一方暴露于激光束而形成光滑面。 在激光加工期间，暴露于激光束的玻璃盘的端面被加热熔化。 因此，在激光加工之前形成在玻璃盘的端面上的微小裂纹被消除。 结果，在不进行化学强化处理的情况下，维持玻璃基板的强度。 这消除了由化学强化步骤引起的缺点。

公开(公告)号：US07371155B2

公开(公告)日：2008-05-13

申请号：US10530644

申请日：2003-12-25

申请人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

发明人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

IPC分类号： B24B1/00

摘要： A glass substrate for an information recording medium is manufactured by polishing the surface of a raw material glass plate. The polishing of the raw material glass plate is divided into a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The first polishing process uses a polishing pad made of a synthetic resin foam and slides the polishing pad on the raw material glass plate surface while supplying a polishing agent to roughly polish the surface. A pad dressing process is performed on the polishing pad before being used in the first polishing process. The pad dressing process polishes the surface of the polishing pad by sliding the polishing pad on a pad dresser including abrasive grains.

公开(公告)号：US20060002283A1

公开(公告)日：2006-01-05

申请号：US10530647

申请日：2003-12-25

申请人： Tamaki Horisaka ,  Koichi Suzuki ,  Akihide Minami

发明人： Tamaki Horisaka ,  Koichi Suzuki ,  Akihide Minami

IPC分类号： G11B7/26

CPC分类号： B24B37/042 ,  G11B5/8404

摘要： An information recording medium glass substrate manufactured by polishing the surface of a raw material glass plate. The polishing is divided into two steps, a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The second polishing process, using a polishing pad made of foam, is divided into two stages, pre-polishing with a polishing agent including abrasive grains of cerium oxide and post-polishing with a polishing agent including abrasive grains of silicon oxide. A rinsing process is performed between the pre-polishing and the post-polishing to rinse the raw material glass plate after the pre-polishing with a washing liquid to wash away the abrasive grains collected in the polishing pad in pre-polishing during the rinsing process.

摘要翻译： 通过对原料玻璃板的表面进行研磨而制造的信息记录介质玻璃基板。 抛光分为两个步骤，用于执行第一抛光处理以粗糙地将原料玻璃板的表面抛光为光滑的步骤以及用于进行第二抛光工艺以精细抛光粗抛光原料的表面的步骤 玻璃板更平滑。 使用由泡沫制成的抛光垫的第二抛光工艺被分为两个阶段，用包括氧化铈磨粒的抛光剂进行预抛光，并用包括氧化硅磨粒的抛光剂进行后抛光。 在预抛光和后抛光之间进行漂洗处理，以在用抛光垫预先抛光后冲洗原料玻璃板，以便在漂洗过程中预抛光时洗去在抛光垫中收集的磨料颗粒 。

公开(公告)号：US20060140105A1

公开(公告)日：2006-06-29

申请号：US10530644

申请日：2003-12-25

申请人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

发明人： Akihide Minami ,  Koichi Suzuki ,  Tamaki Horisaka

IPC分类号： G11B3/70

CPC分类号： B24B53/017 ,  B24B37/042 ,  G11B5/8404

摘要： A glass substrate for an information recording medium is manufactured by polishing the surface of a raw material glass plate. The polishing of the raw material glass plate is divided into a step for performing a first polishing process to roughly polish the surface of the raw material glass plate to be smooth and a step for performing a second polishing process to finely polish the surface of the roughly polished raw material glass plate to be smoother. The first polishing process uses a polishing pad made of a synthetic resin foam and slides the polishing pad on the raw material glass plate surface while supplying a polishing agent to roughly polish the surface. A pad dressing process is performed on the polishing pad before being used in the first polishing process. The pad dressing process polishes the surface of the polishing pad by sliding the polishing pad on a pad dresser including abrasive grains.