Invention Grant
- Patent Title: Through-wafer interconnects for photoimager and memory wafers
- Patent Title (中): 用于光刻机和存储晶圆的透晶片互连
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Application No.: US10932296Application Date: 2004-09-02
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Publication No.: US07300857B2Publication Date: 2007-11-27
- Inventor: Salman Akram , Charles Watkins , Mark Hiatt , David Hembree , James Wark , Warren Farnworth , Mark Tuttle , Sidney Rigg , Steven Oliver , Kyle Kirby , Alan Wood , Lu Velicky
- Applicant: Salman Akram , Charles Watkins , Mark Hiatt , David Hembree , James Wark , Warren Farnworth , Mark Tuttle , Sidney Rigg , Steven Oliver , Kyle Kirby , Alan Wood , Lu Velicky
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/441
- IPC: H01L21/441

Abstract:
A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
Public/Granted literature
- US20060043599A1 Through-wafer interconnects for photoimager and memory wafers Public/Granted day:2006-03-02
Information query
IPC分类: