发明授权
US07300857B2 Through-wafer interconnects for photoimager and memory wafers 有权
用于光刻机和存储晶圆的透晶片互连

Through-wafer interconnects for photoimager and memory wafers
摘要:
A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
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