发明授权
- 专利标题: Method for manufacturing quartz glass ingot
- 专利标题(中): 石英玻璃锭的制造方法
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申请号: US09863750申请日: 2001-05-23
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公开(公告)号: US07305852B2公开(公告)日: 2007-12-11
- 发明人: Yoshihiko Gotoh , Shinichi Satoh , Masakazu Kudoh
- 申请人: Yoshihiko Gotoh , Shinichi Satoh , Masakazu Kudoh
- 申请人地址: JP Yamagata-shi
- 专利权人: Tosoh Quartz Corporation
- 当前专利权人: Tosoh Quartz Corporation
- 当前专利权人地址: JP Yamagata-shi
- 代理机构: Flynn, Thiel, Boutell & Tanis, P.C.
- 优先权: JP2000-160920 20000530
- 主分类号: C03B19/09
- IPC分类号: C03B19/09 ; C03B15/18
摘要:
The invention provides a method for manufacturing a large scale quartz glass slab ingot in a flame hydrolysis reaction in a furnace, including the steps of rotating the furnace, depositing a fused silica on a furnace bed, and extending the deposit outwardly by heating and rotation of the furnace, thereby a quartz glass slab ingot is obtained. A quartz glass burner is installed at the ceiling of the furnace, hydrogen gas supplied to the burner flows down along the tapered wall of the oxygen chamber and is ejected into the outer casing. Part of the hydrogen gas is deflected to the center of the burner and mixed with the oxygen just after the ejection from the oxygen gas nozzles. Thereby, the flame is formed smoothly and the thermal efficiency is improved. The flame becomes wide enough and the silica powder transported by the hydrogen gas is uniformly fused by the flame and heat capacity of the fused silica.
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