OPAQUE QUARTZ GLASS AND A METHOD FOR PRODUCING THE SAME

    公开(公告)号:US20240083803A1

    公开(公告)日:2024-03-14

    申请号:US18262842

    申请日:2021-01-30

    IPC分类号: C03B19/06 C03C3/06 C03C4/02

    摘要: A quartz glass provides an opaque quartz glass having high light-shielding property, excellent mechanical strength and excellent cleaning resistance against hydrofluoric acid. By setting the maximum width of the amorphous bubbles existing in the opaque quartz glass to an average of 3 to 15 μm and the density to 2.15 g/cm3 or more, the mechanical strength after baking and the cleaning resistance by hydrofluoric acid are improved. The opaque quartz glass has a whiteness at a thickness of 10 mm of 75 to 90%, the reflectance of light with a wavelength of 0.24 to 2.6 μm at a thickness of 4 mm is 60 to 85%, and the bending strength after baking is 95 MPa. In addition, a foaming agent may be mixed in the opaque quartz glass. An opaque quartz glass having cleaning resistance against acid can be obtained.

    METHOD OF MANUFACTURING OPAQUE QUARTZ GLASS

    公开(公告)号:US20210403374A1

    公开(公告)日:2021-12-30

    申请号:US17292602

    申请日:2018-12-14

    摘要: A method for manufacturing a large sized opaque quartz glass ingot having excellent heat ray shielding and light blocking properties without using a foaming agent. The obtained opaque quartz glass has small diameter spherical bubbles and a preferable mechanical strength. Silica powder is dispersed in water to form a slurry having a silica powder concentration of 45 to 75 wt % and the average particle size of the silica powder is adjusted to 8 μm or less and the standard deviation of the particle size is adjusted to 6 μm or more by wet pulverization. The slurry is sprayed for forming granules of the silica powder. An opaque quartz glass ingot with a small bubble diameter and high mechanical strength is obtained by melting the granulated silica powder.

    Opaque quartz glass and a method for producing the same

    公开(公告)号:US11993538B2

    公开(公告)日:2024-05-28

    申请号:US18262842

    申请日:2021-01-30

    IPC分类号: C03C3/06 C03B19/06 C03C4/02

    摘要: A quartz glass provides an opaque quartz glass having high light-shielding property, excellent mechanical strength and excellent cleaning resistance against hydrofluoric acid. By setting the maximum width of the amorphous bubbles existing in the opaque quartz glass to an average of 3 to 15 μm and the density to 2.15 g/cm3 or more, the mechanical strength after baking and the cleaning resistance by hydrofluoric acid are improved. The opaque quartz glass has a whiteness at a thickness of 10 mm of 75 to 90%, the reflectance of light with a wavelength of 0.24 to 2.6 μm at a thickness of 4 mm is 60 to 85%, and the bending strength after baking is 95 MPa. In addition, a foaming agent may be mixed in the opaque quartz glass. An opaque quartz glass having cleaning resistance against acid can be obtained.

    Method for manufacturing quartz glass ingot
    7.
    发明授权
    Method for manufacturing quartz glass ingot 有权
    石英玻璃锭的制造方法

    公开(公告)号:US07305852B2

    公开(公告)日:2007-12-11

    申请号:US09863750

    申请日:2001-05-23

    IPC分类号: C03B19/09 C03B15/18

    摘要: The invention provides a method for manufacturing a large scale quartz glass slab ingot in a flame hydrolysis reaction in a furnace, including the steps of rotating the furnace, depositing a fused silica on a furnace bed, and extending the deposit outwardly by heating and rotation of the furnace, thereby a quartz glass slab ingot is obtained. A quartz glass burner is installed at the ceiling of the furnace, hydrogen gas supplied to the burner flows down along the tapered wall of the oxygen chamber and is ejected into the outer casing. Part of the hydrogen gas is deflected to the center of the burner and mixed with the oxygen just after the ejection from the oxygen gas nozzles. Thereby, the flame is formed smoothly and the thermal efficiency is improved. The flame becomes wide enough and the silica powder transported by the hydrogen gas is uniformly fused by the flame and heat capacity of the fused silica.

    摘要翻译: 本发明提供了一种用于在炉中进行火焰水解反应的大型石英玻璃板坯的制造方法,包括以下步骤:使炉子旋转,将熔融二氧化硅沉积在炉床上,并通过加热和旋转来向外延伸沉积物 从而得到石英玻璃板坯锭。 石英玻璃燃烧器安装在炉顶上,供给燃烧器的氢气沿着氧气室的锥形壁向下流动,并被排出到外壳中。 氢气的一部分被偏转到燃烧器的中心并且刚刚从氧气喷嘴喷出之后与氧气混合。 由此,能够平稳地形成火焰,提高热效率。 火焰变得足够宽,由氢气输送的二氧化硅粉末通过熔融二氧化硅的火焰和热容均匀地熔合。

    Quartz glass thermal sprayed parts and method for producing the same
    9.
    发明申请
    Quartz glass thermal sprayed parts and method for producing the same 失效
    石英玻璃热喷涂部件及其制造方法

    公开(公告)号:US20040018361A1

    公开(公告)日:2004-01-29

    申请号:US10405226

    申请日:2003-04-03

    IPC分类号: B05D001/08 B32B017/06

    摘要: Parts, especially those formed of quartz glass, for film-forming devices, plasma-treating devices and the like have a problem of inner pollution of the devices with particles given by dropping of deposit films from the parts, a problem of hermetical sealing reduction due to bonding failure of the parts to other parts, and a problem of energy efficiency reduction due to the heat insulation failure in the parts. Parts having a thermal sprayed quartz glass film formed on a substrate have an increased ability to hold a deposit thereon, and have an increased ability to hermetically bond to other parts. The parts having a thermal sprayed black quartz glass film have an increased ability of heat insulation property. Even when washed with acid, the abilities of the parts do not lower. The parts can be used for a long period of time and their life is long.

    摘要翻译: 用于成膜装置,等离子体处理装置等的由石英玻璃形成的部件的部件具有通过从部件下落沉积膜而赋予颗粒的装置的内部污染的问题,由于气密密封减少的问题 将部件与其他部件的接合失败以及由于部件中的隔热故障而导致的能量效率降低的问题。 在基板上形成的具有热喷涂石英玻璃膜的部件具有增加其上的沉积物的能力,并且具有增强的与其它部分密封结合的能力。 具有热喷黑黑石英玻璃膜的部件具有增加的绝热性能。 即使用酸洗,零件的能力也不会降低。 这些零件可以长时间使用,使用寿命长。