Invention Grant
- Patent Title: Micro-electromechanical sensor
- Patent Title (中): 微机电传感器
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Application No.: US11329765Application Date: 2006-01-10
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Publication No.: US07305890B2Publication Date: 2007-12-11
- Inventor: Art Zias , Phil Mauger , Sean Cahill , Norm Nystrom , Albert K. Henning
- Applicant: Art Zias , Phil Mauger , Sean Cahill , Norm Nystrom , Albert K. Henning
- Applicant Address: JP Tokyo
- Assignee: SMC Kabushiki Kaisha
- Current Assignee: SMC Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Morgan Lewis & Bockius LLP
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/00

Abstract:
A force or pressure transducer is includes a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on both the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and another portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured through associated circuitry.
Public/Granted literature
- US20060117857A1 Micro-electromechanical sensor Public/Granted day:2006-06-08
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