Micro-electromechanical sensor
    1.
    发明授权
    Micro-electromechanical sensor 有权
    微机电传感器

    公开(公告)号:US07305890B2

    公开(公告)日:2007-12-11

    申请号:US11329765

    申请日:2006-01-10

    IPC分类号: G01B7/16 G01L1/00

    CPC分类号: G01L1/148 G01L9/0073

    摘要: A force or pressure transducer is includes a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on both the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and another portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured through associated circuitry.

    摘要翻译: 力或压力传感器包括衬底,设置在衬底上的电介质材料,设置在电介质材料上的间隔构件和设置在电介质材料和间隔构件两者上的弹性元件。 弹性元件的一部分与电介质材料分离,弹性元件的另一部分与电介质材料接触。 弹性元件和电介质材料之间的接触面积随弹性元件的移动而变化。 接触区域的变化会改变传感器的电容,可以通过相关的电路测量。

    Micro-electromechanical sensor
    2.
    发明授权

    公开(公告)号:US07047814B2

    公开(公告)日:2006-05-23

    申请号:US10198304

    申请日:2002-07-17

    IPC分类号: G01L9/12

    CPC分类号: G01L1/148 G01L9/0073

    摘要: A force or pressure transducer is disclosed. In one embodiment, the transducer has a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and a portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured by circuit means.

    Micro-electromechanical sensor
    3.
    发明申请

    公开(公告)号:US20060117857A1

    公开(公告)日:2006-06-08

    申请号:US11329765

    申请日:2006-01-10

    IPC分类号: G01L9/12

    CPC分类号: G01L1/148 G01L9/0073

    摘要: A force or pressure transducer is disclosed. In one embodiment, the transducer has a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and a portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured by circuit means.