发明授权
- 专利标题: Diamondoid-containing low dielectric constant materials
- 专利标题(中): 含金刚石的低介电常数材料
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申请号: US10784915申请日: 2004-02-24
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公开(公告)号: US07306671B2公开(公告)日: 2007-12-11
- 发明人: Jeremy E. Dahl , Robert M. Carlson , Shenggao Liu
- 申请人: Jeremy E. Dahl , Robert M. Carlson , Shenggao Liu
- 申请人地址: US CA San Ramon
- 专利权人: Chevron U.S.A.. Inc.
- 当前专利权人: Chevron U.S.A.. Inc.
- 当前专利权人地址: US CA San Ramon
- 代理商 E. Joseph Gess, Esq.
- 主分类号: C30B29/02
- IPC分类号: C30B29/02
摘要:
Novel uses of diamondoid-containing materials in the field of microelectronics are disclosed. Embodiments include, but are not limited to, thermally conductive films in integrated circuit packaging, low-k dielectric layers in integrated circuit multilevel interconnects, thermally conductive adhesive films, thermally conductive films in thermoelectric cooling devices, passivation films for integrated circuit devices (ICs), and field emission cathodes. The diamondoids employed in the present invention may be selected from lower diamondoids, as well as the newly provided higher diamondoids, including substituted and unsubstituted diamondoids. The higher diamondoids include tetramantane, peritamantane, hexamantane, heptamantane, octamantane, nonamantane, decamantane, and undecamantane. The diamondoid-containing material may be fabricated as a diamondoid-containing polymer, a diamondoid-containing sintered ceramic, a diamondoid ceramic composite, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene composite.
公开/授权文献
- US20040198049A1 Diamondoid-containing low dielectric constant materials 公开/授权日:2004-10-07
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