发明授权
- 专利标题： Maskless direct exposure system and user interface
- 专利标题（中）： 无掩膜直接曝光系统和用户界面
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申请号： US10974327申请日： 2004-10-27
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公开(公告)号： US07307691B2公开(公告)日： 2007-12-11
- 发明人: Kazunari Sekigawa , Toshinori Koyama , Kazutaka Kobayashi , Masatoshi Akagawa
- 申请人： Kazunari Sekigawa , Toshinori Koyama , Kazutaka Kobayashi , Masatoshi Akagawa
- 申请人地址： JP Nagano
- 专利权人： Shinko Electric Industries Co., Ltd.
- 当前专利权人： Shinko Electric Industries Co., Ltd.
- 当前专利权人地址： JP Nagano
- 代理机构： Chadbourne & Parke LLP
- 代理商 Joseph A. Calvaruso
- 优先权： JP2003-370593 20031030
- 主分类号： G03B27/46
- IPC分类号： G03B27/46 ; G03B27/42
摘要：
A direct exposure system comprises: a data mask that is a data object including drawing data; and a control mask that is a data object including at least one logical layer in which information about exposure conditions applied according to regions on a substrate is specified, and performs a direct exposure process using integrated data generated by combining the data mask with the control mask.
公开/授权文献
- US20050094120A1 Direct exposure system and user interface 公开/授权日：2005-05-05
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