发明授权
- 专利标题: Method for producing two gates controlling the same channel
- 专利标题(中): 用于产生控制相同通道的两个门的方法
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申请号: US11339101申请日: 2006-01-25
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公开(公告)号: US07312129B2公开(公告)日: 2007-12-25
- 发明人: Sinan Goktepeli , Alexander B. Hoefler , Marius K. Orlowski
- 申请人: Sinan Goktepeli , Alexander B. Hoefler , Marius K. Orlowski
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Hamilton & Terrile, LLP
- 代理商 Michael Rocco Cannatti
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A semiconductor process and apparatus use a predetermined sequence of patterning and etching steps to etch a gate stack (62) formed over a substrate (11) and a first spacer structure (42), thereby forming etched gate structures (72, 74) that are physically separated from one another but that control a substrate channel (71) subsequently defined in the substrate (11) by source/drain regions (82, 102, 84, 104) that are implanted around the etched gate structures (72, 74). Depending on how the first spacer structure (42) is positioned and configured, the channel (71) may be controlled to provide either a logical AND gate (100) or logical OR gate (200) functionality.
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