Invention Grant
- Patent Title: Semiconductor device with multilayered metal pattern
- Patent Title (中): 具有多层金属图案的半导体器件
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Application No.: US10945902Application Date: 2004-09-22
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Publication No.: US07312530B2Publication Date: 2007-12-25
- Inventor: Shin Hashimoto , Tadaaki Mimura
- Applicant: Shin Hashimoto , Tadaaki Mimura
- Applicant Address: JP Osaka
- Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee: Matsushita Electric Industrial Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2003-335267 20030926
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A semiconductor device comprises a first insulating film formed on a semiconductor substrate, a first metal pattern formed on the first insulating film, a second insulating film formed on the first metal pattern, a second metal pattern formed on the second insulating film, and a third metal pattern formed in the second insulating film and connecting between the first metal pattern and the second metal pattern. The third metal pattern is a single continuous structure, and the principal orientation axes of crystals of a metal constituting the third metal pattern are parallel to the principal surface of the semiconductor substrate.
Public/Granted literature
- US20050067707A1 Semiconductor device and method for fabricating the same Public/Granted day:2005-03-31
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