发明授权
- 专利标题: Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus
- 专利标题(中): 压电元件,喷墨头,角速度传感器和喷墨记录装置
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申请号: US11097924申请日: 2005-04-01
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公开(公告)号: US07312558B2公开(公告)日: 2007-12-25
- 发明人: Satoru Fujii , Takeshi Kamada , Atsushi Tomozawa , Eiji Fujii
- 申请人: Satoru Fujii , Takeshi Kamada , Atsushi Tomozawa , Eiji Fujii
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2004-109689 20040402; JP2004-127862 20040423
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; H01L41/04 ; H01L41/16
摘要:
In a piezoelectric element, a cubic or tetragonal orientation control layer (15) is provided on a first electrode layer (14), and formed on the orientation control layer (15) is a piezoelectric layer (16) having a rhombohedral or tetragonal crystalline structure and made of lead zirconate titanate to which a Pb-containing complex perovskite compound expressed by the chemical formula Pb(AaBb)O3 has been added in an amount that is from 1 mol % to 50 mol %. The piezoelectric layer (16) is formed so that the crystal grains thereof become columnar grains which extend in the thickness direction of the piezoelectric layer (16) and in which the ratio of the average cross-sectional diameter to the length is from 1/50 to 1/14.
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