发明授权
US07312558B2 Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus 有权
压电元件,喷墨头,角速度传感器和喷墨记录装置

Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus
摘要:
In a piezoelectric element, a cubic or tetragonal orientation control layer (15) is provided on a first electrode layer (14), and formed on the orientation control layer (15) is a piezoelectric layer (16) having a rhombohedral or tetragonal crystalline structure and made of lead zirconate titanate to which a Pb-containing complex perovskite compound expressed by the chemical formula Pb(AaBb)O3 has been added in an amount that is from 1 mol % to 50 mol %. The piezoelectric layer (16) is formed so that the crystal grains thereof become columnar grains which extend in the thickness direction of the piezoelectric layer (16) and in which the ratio of the average cross-sectional diameter to the length is from 1/50 to 1/14.
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