Invention Grant
- Patent Title: Microelectromechanical devices with low inertia movable elements
- Patent Title (中): 具有低惯性可移动元件的微机电装置
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Application No.: US11135230Application Date: 2005-05-23
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Publication No.: US07312915B2Publication Date: 2007-12-25
- Inventor: Satyadev Patel , Jianglong Zhang
- Applicant: Satyadev Patel , Jianglong Zhang
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agency: Wade James Brady, III
- Agent Frederick J. Telecky, Jr.
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08
Abstract:
A microelectromechanical device having a movable element with low mass inertia is disclosed herein. The movable element is held on a substrate such that the element is capable of rotating relative to the substrate; and the element has a mass inertia of 1.2×10−24 kg·m2 or less.
Public/Granted literature
- US20060262382A1 Microelectromechanical devices with low inertia movable elements Public/Granted day:2006-11-23
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